Capabilities and Equipment

The Minnesota Nano Center has over $30 million of equipment in place and operational for

  • Optical, imprint, and electron beam lithography
  • Thin film deposition of metals, alloys, and ceramic compounds
  • Annealing, oxidation, and doping of substrates
  • Wet etching, reactive ion etching, and ion milling
  • Optical mask development

More information on MNC capabilities


The Center for Nanoscale Science and Engineering at NDSU maintains 14,500 sq. feet of lab and cleanroom space for work in

  • Thin and thick film devices
  • Printed circuit board assembly
  • Advanced chip packaging: processor, memory, and system-in-package chips
  • MEMS
  • Test and measurement
  • Curing, aging, and storage

Full list of fabrication and measurement tools at CNSE