Device Fabrication

Microelectronic Device Fabrication


Microlithography and micro-device fabrication have been at the core of our work for decades.

The Minnesota Nano Center (MNC) at the University of Minnesota

The MNC maintains two class 100 cleanrooms and a full tool set for advanced micro- and nanolithography. The Center recently added powerful new tools for high resolution lithography capable of making features as small as 10 nanometers.  Recent device fabrication projects include
  • Integrated circuits
  • Microelectromechanical systems (MEMS)
  • Micro-optical systems
  • Microfluidic systems
  • Chemical sensors
  • Biomedical devices