Facilities

The Minnesota Nano Center has over $30 million of equipment in place and operational for

  • Optical, imprint, and electron beam lithography
  • Thin film deposition of metals, alloys, and ceramic compounds
  • Annealing, oxidation, and doping of substrates
  • Wet etching, reactive ion etching, and ion milling
  • Optical mask development

Full list of fabrication and measurement tools at MNC

 

The Center for Nanoscale Science and Engineering at NDSU maintains 14,500 sq. feet of lab and cleanroom space for work in

  • Thin and thick film devices
  • Printed circuit board assembly
  • Advanced chip packaging: processor, memory, and system-in-package chips
  • MEMS
  • Test and measurement
  • Curing, aging, and storage

Full list of fabrication and measurement tools at CNSE