Our Facilities

The Minnesota Nano Center at the University of Minnesota-Twin Cities, Minneapolis MN

The Minnesota Nano Center, or MNC, offers a comprehensive set of tools to help researchers develop new micro- and nanoscale devices, such as integrated circuits, advanced sensors, microelectromechanical systems (MEMS), and microfluidic systems. The MNC maintains two Class 100 cleanrooms totaling 8000 square feet under filter. These cleanrooms offer a full suite of lithography resources, including state-of-the-art tools for fabricating structures as small as 10 nanometers in size. The two cleanrooms have over $30 million of equipment in place and operational for optical and electron beam lithography, thin film deposition, annealing, substrate oxidation and doping, wet and plasma etching, photomask making, and characterization.

The MNC is also equipped to support nanotechnology research in areas as diverse as cell biology, nanomaterials, and biomedical device engineering. The MNC's Nanomaterials Lab allows researchers to make, modify, and analyze small-scale materials, including nanoparticles and micron-scale powders. The Bio-Nano Lab offers facilities and equipment for cell culturing, DNA analysis, and fluorescence microscopy, and is designed to support interdisciplinary research and discovery between nanotechnology and the biosciences.

The Center for Nanoscale Science and Engineering at North Dakota State University, Fargo, North Dakota.

The Center for Nanoscale Science and Engineering supports research and development in the areas of microelectronics and coatings technologies, drawing upon world-class facilities and equipment and staff with broad-based expertise. Located in the NDSU Research & Technology Park in Fargo, CNSE scientists, engineers, and support staff work with federal and state agencies, companies, universities, government laboratories, and NDSU students and faculty on high level research. Established in 2002, the Center’s facilities include 77,000 sf of cleanroom, laboratory, and engineering spaces. CNSE’s facilities and expertise in microelectronic packaging complements the fabrication and bio-nano capabilities of the Minnesota Nano Center, offering users the ability to take their device idea from initial design to finished circuit board.

Tools and Equipment Available at Each Center


The Minnesota Nano Center

The Center for Nanoscale Science and Engineering